Changing of properties of epitaxial layers by choosing of temperature field during growth

EL Pankratov

doi:10.33545/26648636.2019.v1.i2a.9

Changing of properties of epitaxial layers by choosing of temperature field during growth

Author(s):

EL Pankratov

Abstract:

In this paper, we analyze the influence of the temperature of growth of epitaxial layers during their growth. Conditions are formulated under which the homogeneity of the properties of the epitaxial layers increases. An analytical approach for the analysis of mass and heat transfer is proposed, allowing at the same time to take into account changes in the parameters of processes both in space and in time, as well as nonlinearity of these processes.

DOI: 10.33545/26648636.2019.v1.i2a.9

Pages: 29-33 | 1318 Views 539 Downloads

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How to cite this article:

EL Pankratov. Changing of properties of epitaxial layers by choosing of temperature field during growth. Int. J. Phys. Math. 2019;1(2):29-33. DOI: 10.33545/26648636.2019.v1.i2a.9

Vol. 1, Issue 2, Part A (2019)

Changing of properties of epitaxial layers by choosing of temperature field during growth

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